7 Patents
- US125286942026Microelectromechanical System and Method for Manufacturing a Microelectromechanical System
Robert Bosch GmbH
0 cites - 0 cites
- US119885112024Micromechanical Component for a Rotation Rate Sensor and Corresponding Manufacturing Method
ROBERT BOSCH GmbH
0 cites - US118742912024Method for Temperature Compensation of a Microelectromechanical Sensor, and Microelectromechanical Sensor
ROBERT BOSCH GmbH
0 cites - 0 cites
- US117195392023Micromechanical Component for a Yaw Rate Sensor and Corresponding Production Method
ROBERT BOSCH GmbH
0 cites - 0 cites