19 Patents
- US125352732026Workpiece Processing Apparatus with Thermal Processing Systems
Mattson Technology, Inc.
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- US124127582025Workpiece Processing Apparatus with Thermal Processing Systems
Mattson Technology, Inc.
0 cites - US123990642025Systems and Methods for Thermal Processing and Temperature Measurement of a Workpiece at Low Temperatures
Mattson Technology, Inc.
0 cites - US124009162025Transmission-based Temperature Measurement of a Workpiece in a Thermal Processing System
Mattson Technology, Inc.
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- US121835582024Workpiece Processing Apparatus with Thermal Processing Systems
Mattson Technology, Inc.
0 cites - 0 cites
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- US120805682024Support Plate for Localized Heating in Thermal Processing Systems
Beijing E-town Semiconductor Technology Co., Ltd.
0 cites - 0 cites
- US120464892024Workpiece Processing Apparatus with Thermal Processing Systems
Mattson Technology, Inc.
0 cites - US119553882024Transmission-based Temperature Measurement of a Workpiece in a Thermal Processing System
Mattson Technology, Inc.
0 cites - US118374472023Workpiece Processing Apparatus with Plasma and Thermal Processing Systems
Mattson Technology, Inc.
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- US116108242023Transmission-based Temperature Measurement of a Workpiece in a Thermal Processing System
MATTSON TECHNOLOGY, Inc.
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