Patents/Inventors

Roie Volkovich

HaderaIL10 patents

10 Patents

US123931132025
Inter-step Feedforward Process Control in the Manufacture of Semiconductor Devices
KLA CORPORATION
0 cites
US123477062025
Method for Measuring and Correcting Misregistration Between Layers in a Semiconductor Device, and Misregistration Targets Useful Therein
KLA-TENCOR CORPORATION
0 cites
US122221992025
Systems and Methods for Measurement of Misregistration and Amelioration Thereof
KLA Corporation
0 cites
US119716642024
Reducing Device Overlay Errors
KLA-TENCOR CORPORATION
0 cites
US118625212024
Multiple-tool Parameter Set Calibration and Misregistration Measurement System and Method
KLA CORPORATION
0 cites
US117619692023
System and Method for Analyzing a Sample with a Dynamic Recipe Based on Iterative Experimentation and Feedback
KLA Corporation
0 cites
US116444192023
Measurement of Properties of Patterned Photoresist
KLA Corporation
0 cites
US116401172023
Selection of Regions of Interest for Measurement of Misregistration and Amelioration Thereof
KLA CORPORATION
0 cites
US116356822023
Systems and Methods for Feedforward Process Control in the Manufacture of Semiconductor Devices
KLA Corporation
0 cites
US115519802023
Dynamic Amelioration of Misregistration Measurement
KLA-TENCOR CORPORATION
0 cites