Patents/Inventors

Rohit Ode

Portland, ORUS13 patents

4 Patents

US126032632026
Apparatuses and Techniques for Cleaning a Multi-station Semiconductor Processing Chamber
Lam Research Corporation
0 cites
US125801592026
Plasma Showerhead Assembly and Method of Reducing Defects
Applied Materials, Inc.
0 cites
US125395692026
Grouping Features of Showerheads in Substrate Processing Systems
LAM RESEARCH CORPORATION
0 cites
US124420802025
Plasma Showerhead Assembly and Method of Reducing Defects
Applied Materials, Inc.
0 cites