Patents/Inventors

Robin Mair

West Chicago, ILUS2 patents

3 Patents

US120925652024
Non-destructive Inspection and Manufacturing Metrology Systems and Methods
Onto Innovation Inc.
0 cites
US119886412024
Characterization of Patterned Structures Using Acoustic Metrology
Onto Innovation Inc.
0 cites
US116686442023
Opto-acoustic Measurement of a Transparent Film Stack
Onto Innovation Inc.
0 cites