Patents/Inventors

Roberto B. Wiener

Ridgefield, CTUS3 patents

3 Patents

US125299632026
Fast Uniformity Drift Correction
ASML Holding N.V.
0 cites
US124052272025
Method for Region of Interest Processing for Reticle Particle Detection
ASML Holding N.V.
0 cites
US121893122025
Reticle Gripper Damper and Isolation System for Lithographic Apparatuses
ASML Netherlands B.V.
0 cites