7 Patents
- US123126782025Methods for Depositing a Tungsten or Molybdenum Layer in the Presence of a Reducing Co-reactant
ENTEGRIS, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- US117464132023Chemical Delivery System and Method of Operating the Chemical Delivery System
ENTEGRIS, Inc.
0 cites - US115606252023Vapor Deposition of Molybdenum Using a Bis(alkyl-arene) Molybdenum Precursor
ENTEGRIS, Inc.
0 cites