9 Patents
- 0 cites
- 0 cites
- US119538262024Lined Photobucket Structure for Back End of Line (BEOL) Interconnect Formation
Intel Corporation
0 cites - 0 cites
- 0 cites
- US118746002024Ligand-capped Main Group Nanoparticles as High Absorption Extreme Ultraviolet Lithography Resists
Intel Corporation
0 cites - 0 cites
- US118548822023Subtractive Plug and Tab Patterning with Photobuckets for Back End of Line (BEOL) Spacer-based Interconnects
Tahoe Research, Ltd.
0 cites - 0 cites