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Robert Jeffrey Wade
Stamford, CT
US
1 patent
2 Patents
US12474633
2025
Pod Handling Systems and Methods for a Lithographic Device
ASML HOLDING N.V.
0 cites
US12189312
2025
Reticle Gripper Damper and Isolation System for Lithographic Apparatuses
ASML Netherlands B.V.
0 cites