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Inventors
Robert Huggare
Almere
NL
1 patent
2 Patents
US11802338
2023
Chemical Treatment, Deposition And/or Infiltration Apparatus and Method for Using the Same
ASM IP Holding B.V.
0 cites
US11549177
2023
Process for Passivating Dielectric Films
ASM INTERNATIONAL, N.V.
0 cites