7 Patents
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- US125337092026Silacyclic Compounds and Methods for Depositing Silicon-containing Films Using Same
Versum Materials US, LLC
0 cites - US125059992025Precursors and Flowable CVD Methods for Making Low-k Films to Fill Surface Features
Versum Materials US, LLC
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- US124287222025Compositions and Methods Using Same for Deposition of Silicon-containing Film
Versum Materials US, LLC
0 cites - US120496952024Compositions and Methods Using Same for Deposition of Silicon-containing Film
Versum Materials US, LLC
0 cites