16 Patents
- US125884342026Methods for Forming Dielectric Materials with Selected Polarization for Semiconductor Devices
Tokyo Electron Limited
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- US124216042025Ultra-shallow Dopant and Ohmic Contact Regions by Solid State Diffusion
Tokyo Electron Limited
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- US122726012025Epitaxial High-k Etch Stop Layer for Backside Reveal Integration
Tokyo Electron Limited
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- US122372162025Method for Filling Recessed Features in Semiconductor Devices with a Low-resistivity Metal
Tokyo Electron Limited
0 cites - US122119072025Semiconductor Manufacturing Platform with In-situ Electrical Bias and Methods Thereof
Tokyo Electron Limited
0 cites - US119787352024Transistor Stack of Vertical Channel Ferroelectric Fets and Methods of Forming the Transistor Stack
Tokyo Electron Limited
0 cites - US119676402024Crystalline Dielectric Systems for Interconnect Circuit Manufacturing
Tokyo Electron Limited
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