Patents/Inventors

Risako Matsuda

MiyagiJP6 patents

5 Patents

US118994762024
Method and Apparatus for Measuring Gas Flow
TOKYO ELECTRON LIMITED
0 cites
US117422282023
Substrate Processing Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US116441212023
Gas Inspection Method, Substrate Processing Method, and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US115857172023
Method for Calibrating Plurality of Chamber Pressure Sensors and Substrate Processing System
Tokyo Electron Limited
0 cites
US115557552023
Method of Calibrating Multiple Chamber Pressure Sensors
TOKYO ELECTRON LIMITED
0 cites