13 Patents
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- US122781252025Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
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- US121836042024Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
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- US120625382024Atomic Layer Etch and Selective Deposition Process for Extreme Ultraviolet Lithography Resist Improvement
Lam Research Corporation
0 cites - US120515892024Tin Oxide Thin Film Spacers in Semiconductor Device Manufacturing
Lam Research Corporation
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- US117840472023Tin Oxide Thin Film Spacers in Semiconductor Device Manufacturing
Lam Research Corporation
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