3 Patents
- US121969502025Driving Signal Parameter Variation for Driving MEMS Mirrors for Synchronization Control and Tuning Lissajous Scanning
Infineon Technologies AG
0 cites - US118357102023Method of Mode Coupling Detection and Damping and Usage for Electrostatic MEMS Mirrors
Infineon Technologies AG
0 cites - US117822632023Capacitive Charge Based Self-sensing and Position Observer for Electrostatic MEMS Mirrors
Infineon Technologies AG
0 cites