Richard M. Blank

7 Patents

• US124855542025

  Wafer Handling Robot with Gravitational Field Sensor

  Lam Research Corporation

  0 cites
• US124802082025

  Dynamic Sheath Control with Edge Ring Lift

  Lam Research Corporation

  0 cites
• US123410402025

  Integrated Adaptive Positioning Systems and Routines for Automated Wafer-handling Robot Teach and Health Check

  Lam Research Corporation

  0 cites
• US122725832025

  Reduced Footprint Wafer Handling Platform

  Lam Research Corporation

  0 cites
• US118336622023

  Wafer Handling Robot with Radial Gas Curtain And/or Interior Volume Control

  Lam Research Corporation

  0 cites
• US116996102023

  Rotational Indexer with Additional Rotational Axes

  Lam Research Corporation

  0 cites
• US115812142023

  Enhanced Automatic Wafer Centering System and Techniques for Same

  Lam Research Corporation

  0 cites