4 Patents
- US124547532025Compositions and Methods Using Same for Deposition of Silicon-containing Film
Versum Materials US, LLC
0 cites - US122304962025Organoaminosilane Precursors and Methods for Depositing Films Comprising Same
VERSUM MATERIALS US, LLC
0 cites - US117354132023Precursors and Flowable CVD Methods for Making Low-k Films to Fill Surface Features
Versum Materials US, LLC
0 cites - US115848542023Compositions and Methods for the Deposition of Silicon Oxide Films
Versum Materials US, LLC
0 cites