Patents/Inventors

Richard Blank

Fremont, CAUS4 patents

5 Patents

US124890062025
Auto-calibration to a Station of a Process Module That Spins a Wafer
Lam Research Corporation
0 cites
US123226412025
Mechanical Indexer for Multi-station Process Module
LAM RESEARCH CORPORATION
0 cites
US121683012024
Fixture for Automatic Calibration of Substrate Transfer Robot
LAM RESEARCH CORPORATION
0 cites
US119087142024
Transfer Robot for Reduced Footprint Platform Architecture
Lam Research Corporation
0 cites
US117422292023
Auto-calibration to a Station of a Process Module That Spins a Wafer
Lam Research Corporation
0 cites