Patents/Inventors

Richard Alan Gottscho

Menlo Park, CAUS1 patent

2 Patents

US122781252025
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites
US121836042024
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites