Patents/Inventors

Richard A. Gottscho

Menlo Park, CAUS4 patents

4 Patents

US125108252025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US125108262025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US122179452025
Sorption Chamber Walls for Semiconductor Equipment
Lam Research Corporation
0 cites
US121054222024
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites