6 Patents
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- US119617222024Method and Apparatus for Controlling Stress Variation in a Material Layer Formed via Pulsed DC Physical Vapor Deposition
SPTS TECHNOLOGIES LIMITED
0 cites - US119131092024Apparatus and a Method of Controlling Thickness Variation in a Material Layer Formed Using Physical Vapour Deposition
SPTS TECHNOLOGIES LIMITED
0 cites - US118759802024Method and Apparatus for Depositing a Material0 cites
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