Renzo Capelli

6 Patents

• US124227432025

  Method for Measuring a Reflectivity of an Object for Measurement Light and Metrology System for Carrying Out the Method

  Carl Zeiss SMT GmbH

  0 cites
• US123724312025

  Method for Determining an Imaging Quality of an Optical System When Illuminated by Illumination Light Within a Pupil to Be Measured

  Carl Zeiss SMT GmbH

  0 cites
• US122882722025

  Method for Determining a Production Aerial Image of an Object to Be Measured

  Carl Zeiss SMT GmbH

  0 cites
• US121745462024

  Method for Measuring an Effect of a Wavelength-dependent Measuring Light Reflectivity and an Effect of a Polarization of Measuring Light on a Measuring Light Impingement on a Lithography Mask

  Carl Zeiss SMT GmbH

  0 cites
• US117969262023

  Metrology System for Examining Objects with EUV Measurement Light

  Carl Zeiss SMT GmbH

  0 cites
• US117748482023

  Method and Apparatus for Repairing Defects of a Photolithographic Mask for the EUV Range

  Carl Zeiss SMT GmbH

  0 cites