Ren-guan Duan

5 Patents

• US125923642026

  Fluoride Coating to Improve Chamber Performance

  Applied Materials, Inc.

  0 cites
• US122758322025

  Fluorine-containing Elastomer Composition and Method for Making Cured Fluorine-containing Elastomer Composition

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US120496972024

  Multilayer ALD Coating for Critical Components in Process Chamber

  Taiwan Semiconductor Manufacturing Company, Ltd.

  0 cites
• US119843022024

  Magnetic-material Shield Around Plasma Chambers Near Pedestal

  Applied Materials, Inc.

  0 cites
• US117319072023

  Ceramic Material with High Thermal Shock Resistance and High Erosion Resistance

  Applied Materials, Inc.

  0 cites