Patents/Inventors

Reinier Theodorus Martinus Jilisen

EindhovenNL2 patents

3 Patents

US123264282025
Residual Gas Analyzer
ASML NETHERLANDS B.V.
0 cites
US121587052024
End-of-life Monitoring of Dynamic Gas Lock Membranes and Pupil Facet Mirrors and Detection of Membrane Rupture in Lithographic Apparatuses
ASML Holding N.V. & ASML Netherlands B.V.
0 cites
US117037682023
Lithographic Apparatus and Related Methods
ASML Netherlands B.V.
0 cites