Patents/Inventors

Reiko Sasahara

NirasakiJP4 patents

3 Patents

US125123022025
Gas Treatment Apparatus
Tokyo Electron Limited
0 cites
US123810902025
Etching Method and Etching Apparatus
Tokyo Electron Limited
0 cites
US115488042023
Method and Apparatus for Processing Oxygen-containing Workpiece
TOKYO ELECTRON LIMITED
0 cites