Patents/Inventors

Ravichandra Jagannath

Milpitas, CAUS1 patent

2 Patents

US124189722025
Confocal Chromatic Metrology for EUV Source Condition Monitoring
KLA Corporation
0 cites
US121585762024
Counterflow Gas Nozzle for Contamination Mitigation in Extreme Ultraviolet Inspection Systems
KLA Corporation
0 cites