5 Patents
- US123410372025Temperature Control Apparatus for Semiconductor Processing Equipment, and Temperature Control Method for the Same
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites - US123098912025Control Method for Multi-zone Active-matrix Temperature Control in Plasma Processing Apparatus
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites - US120946932024Bottom Electrode Assembly, Plasma Processing Apparatus, and Method of Replacing Focus Ring
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites - US116768032023Liner Assembly for Vacuum Treatment Apparatus, and Vacuum Treatment Apparatus
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites - US116211492023Corrosion-resistant Gas Delivery Assembly, and Plasma Processing Apparatus
ADVANCED MICRO-FABRICATION EQUIPMENT Inc. CHINA
0 cites