Patents/Inventors

Raphael Nico Johan Stegen

EindhovenNL1 patent

2 Patents

US118090862023
Fluid Handling Structure, a Lithographic Apparatus, a Method of Using a Fluid Handling Structure and a Method of Using a Lithographic Apparatus
ASML NETHERLANDS B.V.
0 cites
US117200322023
Process Tool and an Inspection Method
ASML NETHERLANDS B.V.
0 cites