17 Patents
- US125312202026Automated Feedforward and Feedback Sequence for Patterning CD Control
Lam Research Corporation
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- US123082642025Rapid Tuning of Critical Dimension Non-uniformity by Modulating Temperature Transients of Multi-zone Substrate Supports
Lam Research Corporation
0 cites - US122665092025Multilayer Coatings of Component Parts for a Work Piece Processing Chamber
LAM RESEARH CORPORATION
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- US121105862024Pedestals for Modulating Film Properties in Atomic Layer Deposition (ALD) Substrate Processing Chambers
LAM RESEARCH CORPORATION
0 cites - US120716892024Trim and Deposition Profile Control with Multi-zone Heated Substrate Support for Multi-patterning Processes
Lam Research Corporation
0 cites - US120625542024Progressive Heating of Components of Substrate Processing Systems Using TCR Element-based Heaters
LAM RESEARCH CORPORATION
0 cites - US120496982024Systems and Methods for Reducing Effluent Build-up in a Pumping Exhaust System
LAM RESEARCH CORPORATION
0 cites - US119591722024Substrate Processing Systems Including Gas Delivery System with Reduced Dead Legs
LAM RESEARCH CORPORATION
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- US119087152024Dynamic Temperature Control of Substrate Support in Substrate Processing System
LAM RESEARCH CORPORATION
0 cites - US117252822023Suppression of Parasitic Deposition in a Substrate Processing System by Suppressing Precursor Flow and Plasma Outside of Substrate Region
Novellus Systems, Inc.
0 cites - US116616542023Substrate Processing Systems Including Gas Delivery System with Reduced Dead Legs
LAM RESEARCH CORPORATION
0 cites