Patents/Inventors

Ragesh Puthenkovilakam

Portland, ORUS4 patents

4 Patents

US125884752026
High Selectivity Doped Hardmask Films
Lam Research Corporation
0 cites
US124566212025
Inert Gas Implantation for Hard Mask Selectivity Improvement
Lam Research Corporation
0 cites
US124354122025
High Density, Modulus, and Hardness Amorphous Carbon Films at Low Pressure
Lam Research Corporation
0 cites
US118374412023
Depositing a Carbon Hardmask by High Power Pulsed Low Frequency RF
Lam Research Corporation
0 cites