9 Patents
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- US120929632024Method of Determining Characteristic of Patterning Process Based on Defect for Reducing Hotspot
ASML NETHERLANDS B.V.
0 cites - US119773342024Wavefront Optimization for Tuning Scanner Based on Performance Matching
ASML NETHERLANDS B.V.
0 cites - US119721942024Method for Determining Patterning Device Pattern Based on Manufacturability
ASML NETHERLANDS B.V.
0 cites - US117893712023Methods of Determining Scattering of Radiation by Structures of Finite Thicknesses on a Patterning Device
ASML NETHERLANDS B.V.
0 cites - US117344902023Method for Determining Curvilinear Patterns for Patterning Device
ASML NETHERLANDS B.V.
0 cites - 0 cites
- US115861142023Wavefront Optimization for Tuning Scanner Based on Performance Matching
ASML Netherlands B.V.
0 cites - US115802892023Method for Determining Patterning Device Pattern Based on Manufacturability
ASML Netherlands B.V.
0 cites