Patents/Inventors

Raewon Yi

Suwon-siKR2 patents

3 Patents

US119340922024
Method of Annealing Reflective Photomask by Using Laser
Samsung Electronics Co., Ltd.
0 cites
US118525832023
Apparatus and Method for Measuring Phase of Extreme Ultraviolet (EUV) Mask and Method of Fabricating EUV Mask Including the Method
Samsung Electronics Co., Ltd.
0 cites
US116353712023
Apparatus and Method for Measuring Phase of Extreme Ultraviolet (EUV) Mask and Method of Fabricating EUV Mask Including the Method
Samsung Electronics Co., Ltd.
0 cites