3 Patents
- US121166692024Integrated Showerhead with Improved Hole Pattern for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites - US117027482023Wafer Level Uniformity Control in Remote Plasma Film Deposition
Lam Research Corporation
0 cites - US116085592023Integrated Showerhead with Thermal Control for Delivering Radical and Precursor Gas to a Downstream Chamber to Enable Remote Plasma Film Deposition
Lam Research Corporation
0 cites