Patents/Inventors

Qingpo Xi

Fremont, CAUS6 patents

7 Patents

US122780812025
System and Method for Alignment of Secondary Beams in Multi-beam Inspection Apparatus
ASML Netherlands B.V.
0 cites
US121911092025
Sample Pre-charging Methods and Apparatuses for Charged Particle Beam Inspection
ASML Netherlands B.V.
0 cites
US121658302024
Multiple Charged-particle Beam Apparatus with Low Crosstalk
ASML Netherlands B.V.
0 cites
US120338302024
Multiple Charged-particle Beam Apparatus with Low Crosstalk
ASML Netherlands B.V.
0 cites
US119616982024
Replaceable Module for a Charged Particle Apparatus
ASML Netherlands B.V.
0 cites
US116767922023
Sample Pre-charging Methods and Apparatuses for Charged Particle Beam Inspection
ASML Netherlands, B.V
0 cites
US116144162023
System and Method for Aligning Electron Beams in Multi-beam Inspection Apparatus
ASML Netherlands B.V.
0 cites