Patents/Inventors

Qiaowei Lou

Albany, NYUS2 patents

3 Patents

US124943692025
Extreme Ultraviolet Lithography Patterning Method
Tokyo Electron Limited
0 cites
US119159312024
Extreme Ultraviolet Lithography Patterning Method
Tokyo Electron Limited
0 cites
US116580382023
Method for Dry Etching Silicon Carbide Films for Resist Underlayer Applications
Tokyo Electron Limited
0 cites