Patents/Inventors

Purushottam Kumar

Hillsboro, ORUS16 patents

15 Patents

US124486872025
Dynamic Precursor Dosing for Atomic Layer Deposition
Lam Research Corporation
0 cites
US124313492025
In-situ Control of Film Properties During Atomic Layer Deposition
Lam Research Corporation
0 cites
US123548712025
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
Lam Research Corporation
0 cites
US123226192025
Dynamic Process Control in Semiconductor Manufacturing
Lam Research Corporation
0 cites
US122886852025
Modifying Hydrophobicity of a Wafer Surface Using an Organosilicon Precursor
Lam Research Corporation
0 cites
US121257052024
Method for Providing Doped Silicon Using a Diffusion Barrier Layer
LAM RESEARCH CORPORATION
0 cites
US120778592024
Variable Cycle and Time RF Activation Method for Film Thickness Matching in a Multi-station Deposition System
Lam Research Corporation
0 cites
US120573002024
Apparatus for Cleaning Plasma Chambers
LAM RESEARCH CORPORATION
0 cites
US120496992024
Dielectric Gapfill Using Atomic Layer Deposition (ALD), Inhibitor Plasma and Etching
LAM RESEARCH CORPORATION
0 cites
US120209232024
Low-κ ALD Gap-fill Methods and Material
Lam Research Corporation
0 cites
US119707722024
Dynamic Precursor Dosing for Atomic Layer Deposition
Lam Research Corporation
0 cites
US119131132024
Method and Apparatus for Modulating Film Uniformity
LAM RESEARCH CORPORATION
0 cites
US116705032023
Method of Atomic Layer Deposition
Lam Research Corporation
0 cites
US116519632023
Method of Improving Deposition Induced CD Imbalance Using Spatially Selective Ashing of Carbon Based Film
Lam Research Corporation
0 cites
US116461982023
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
Lam Research Corporation
0 cites