Patents/Inventors

Pulkit Agarwal

Beaverton, ORUS14 patents

13 Patents

US125312202026
Automated Feedforward and Feedback Sequence for Patterning CD Control
Lam Research Corporation
0 cites
US124736332025
Plasma Enhanced Atomic Layer Deposition of Silicon-containing Films
Lam Research Corporation
0 cites
US124513462025
Modulated Atomic Layer Deposition
Lam Research Corporation
0 cites
US123226192025
Dynamic Process Control in Semiconductor Manufacturing
Lam Research Corporation
0 cites
US123082642025
Rapid Tuning of Critical Dimension Non-uniformity by Modulating Temperature Transients of Multi-zone Substrate Supports
Lam Research Corporation
0 cites
US122093122025
Temperature Control of a Multi-zone Pedestal
LAM RESEARCH CORPORATION
0 cites
US121868512025
Use of Vacuum During Transfer of Substrates
Lam Research Corporation
0 cites
US120716892024
Trim and Deposition Profile Control with Multi-zone Heated Substrate Support for Multi-patterning Processes
Lam Research Corporation
0 cites
US120573002024
Apparatus for Cleaning Plasma Chambers
LAM RESEARCH CORPORATION
0 cites
US120401812024
Modulated Atomic Layer Deposition
Lam Research Corporation
0 cites
US119131132024
Method and Apparatus for Modulating Film Uniformity
LAM RESEARCH CORPORATION
0 cites
US116519632023
Method of Improving Deposition Induced CD Imbalance Using Spatially Selective Ashing of Carbon Based Film
Lam Research Corporation
0 cites
US115425992023
Method and Apparatus for Providing Station to Station Uniformity
Lam Research Corporation
0 cites