23 Patents
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- US122116942025Ultra-high Modulus and Etch Selectivity Boron-carbon Hardmask Films
APPLIED MATERIALS, Inc.
0 cites - US122117282025Electrostatic Chuck Design with Improved Chucking and Arcing Performance
Applied Materials, Inc.
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- US118307062023Heated Pedestal Design for Improved Heat Transfer and Temperature Uniformity
Applied Materials, Inc.
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- US117281682023Ultra-high Modulus and Etch Selectivity Boron-carbon Hardmask Films
APPLIED MATERIALS, Inc.
0 cites - US116825742023Electrostatic Chuck Design with Improved Chucking and Arcing Performance
Applied Materials, Inc.
0 cites - 0 cites
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