Patents/Inventors

Pramod Subramonium

Beaverton, ORUS3 patents

4 Patents

US123851382025
Plasma-enhanced Deposition of Film Stacks
Novellus Systems, Inc.
0 cites
US120401802024
Nitride Films with Improved Etch Selectivity for 3D NAND Integration
Lam Research Corporation
0 cites
US118374412023
Depositing a Carbon Hardmask by High Power Pulsed Low Frequency RF
Lam Research Corporation
0 cites
US117464202023
PECVD Apparatus for In-situ Deposition of Film Stacks
Novellus Systems, Inc.
0 cites