Patents/Inventors

Pradeep Vukkadala

Santa Clara, CAUS7 patents

7 Patents

US125796312026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617902026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US125617912026
Method to Calibrate, Predict, and Control Stochastic Defects in EUV Lithography
KLA Corporation
0 cites
US124061972025
Prediction and Metrology of Stochastic Photoresist Thickness Defects
KLA Corporation
0 cites
US119661562024
Lithography Mask Repair by Simulation of Photoresist Thickness Evolution
KLA Corporation
0 cites
US117618802023
Process-induced Distortion Prediction and Feedforward and Feedback Correction of Overlay Errors
KLA Corporation
0 cites
US116825702023
Process-induced Displacement Characterization During Semiconductor Production
KLA Corporation
0 cites