Patents/Inventors

Po-lung Hung

HsinchuTW1 patent

2 Patents

US123343142025
Dry Etcher Uniformity Control by Tuning Edge Zone Plasma Sheath
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US121424942024
Small Gas Flow Monitoring of Dry Etcher by OES Signal
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites