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Inventors
Pirmin Rombach
Kongens Lyngby
DK
1 patent
2 Patents
US12269734
2025
Microelectromechanical Microphone with Membrane Trench Reinforcements and Method of Fabrication
TDK Corporation
0 cites
US12116269
2024
Microelectromechanical Microphone Having a Robust Backplate
TDK Corporation
0 cites