Patents/Inventors

Pingshan Luan

Albany, NYUS8 patents

4 Patents

US126205542026
Plasma Processing with Phase-locked Waveforms
Tokyo Electron Limited
0 cites
US122725582025
Selective and Isotropic Etch of Silicon Over Silicon-germanium Alloys and Dielectrics; via New Chemistry and Surface Modification
Tokyo Electron Limited
0 cites
US120026832024
Lateral Etching of Silicon
Tokyo Electron Limited
0 cites
US118374672023
Plasma Etching Techniques
Toyko Electron Limited
0 cites