Patents/Inventors

Pil Kyun Heo

Yongin-siKR16 patents

14 Patents

US125884522026
Substrate Processing Apparatus and Method Thereof
SEMES CO., Ltd.
0 cites
US125753582026
Flow Resistance Generating Unit and Substrate Treating Apparatus Including the Same
SEMES CO., Ltd.
0 cites
US124630862025
Substrate Treating Apparatus and Substrate Treating Method
SEMES CO., Ltd.
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US124292832025
Method and Apparatus for Treating a Substrate
Semes Co., Ltd.
0 cites
US123373562025
Moving Assembly for Recovery Guard and Substrate Processing Apparatus
SEMES CO., Ltd.
0 cites
US123005192025
Surface Treatment Method
SEMES CO., Ltd.
0 cites
US120947332024
Substrate Treatment Apparatus
SEMES CO., Ltd.
0 cites
US120464662024
Method and Apparatus for Treating Substrate
SEMES CO., Ltd.
0 cites
US119407342024
Apparatus and Method for Treating Substrate
SEMES CO., Ltd.
0 cites
US119232162024
Apparatus and Method for Treating Substrate Including Process Chambers and Transfer Chamber
SEMES CO., Ltd.
0 cites
US118878832024
Heterogeneous Composite Material and Method for Producing the Same
Semes Co., Ltd.
0 cites
US118043712023
Substrate Treatment Apparatus and Method of Performing Treatment Process on Substrate
SEMES CO., Ltd.
0 cites
US117640842023
Surface Treatment Apparatus and Surface Treatment Method
SEMES CO., Ltd.
0 cites
US116825772023
Spin Head, Apparatus and Method for Treating a Substrate Including the Spin Head
SEMES CO., Ltd.
0 cites