Patents/Inventors

Phillip Friddle

Clifton Park, NYUS1 patent

2 Patents

US122610442025
Multi-layer Hardmask for Defect Reduction in EUV Patterning
International Business Machines Corporation
0 cites
US122371752025
Polymerization Protective Liner for Reactive Ion Etch in Patterning
International Business Machines Corporation
0 cites