8 Patents
- US124068652025Substrate Carrier with Array of Independently Controllable Heater Elements
Applied Materials, Inc.
0 cites - US122725752025Advanced Temperature Control for Wafer Carrier in Plasma Processing Chamber
Applied Materials, Inc.
0 cites - 0 cites
- US119292412024Temperature Measurement for Substrate Carrier Using a Heater Element Array
Applied Materials, Inc.
0 cites - US118702522024Consolidated Filter Arrangement for Devices in an RF Environment
Applied Materials, Inc.
0 cites - US118374792023Advanced Temperature Control for Wafer Carrier in Plasma Processing Chamber
Applied Materials, Inc.
0 cites - 0 cites
- US116159732023Substrate Carrier Using a Proportional Thermal Fluid Delivery System
Applied Materials, Inc.
0 cites