Patents/Inventors

Philip S. H. Chen

Bethel, CTUS7 patents

7 Patents

US123593092025
Group VI Metal Deposition Process
ENTEGRIS, Inc.
0 cites
US122643922025
Silicon Precursor Compounds and Method for Forming Silicon-containing Films
ENTEGRIS, Inc.
0 cites
US122527872025
Methods for Depositing Tungsten or Molybdenum Films
ENTEGRIS, Inc.
0 cites
US122091052025
Vapor Deposition Precursor Compounds and Process of Use
ENTEGRIS, Inc.
0 cites
US119878782024
Chemical Vapor Deposition Processes Using Ruthenium Precursor and Reducing Gas
ENTEGRIS, Inc.
0 cites
US117610812023
Methods for Depositing Tungsten or Molybdenum Films
ENTEGRIS, Inc.
0 cites
US115606252023
Vapor Deposition of Molybdenum Using a Bis(alkyl-arene) Molybdenum Precursor
ENTEGRIS, Inc.
0 cites