25 Patents
- US124379792025Capacitive Sensors and Capacitive Sensing Locations for Plasma Chamber Condition Monitoring
Applied Materials, Inc.
0 cites - US124380052025Low Temperature Selective Etching of Silicon Nitride Using Microwave Plasma
Applied Materials, Inc.
0 cites - 0 cites
- US123409782025Symmetric and Irregular Shaped Plasmas Using Modular Microwave Sources
Applied Materials, Inc.
0 cites - US123004972025Method and Apparatus of Low Temperature Plasma Enhanced Chemical Vapor Deposition of Graphene
Applied Materials, Inc.
0 cites - 0 cites
- US122160152025MEMS Resonator Sensor Substrate for Plasma, Temperature, Stress, or Deposition Sensing
Applied Materials, Inc.
0 cites - 0 cites
- US121911182025Monolithic Modular Microwave Source with Integrated Process Gas Distribution
Applied Materials, Inc.
0 cites - US121440902024Monolithic Modular Microwave Source with Integrated Temperature Control
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- US120126522024Single Process Volume to Perform High-pressure and Low-pressure Processes with Features to Reduce Cross-contamination
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- US118813842024Monolithic Modular Microwave Source with Integrated Process Gas Distribution
Applied Materials, Inc.
0 cites - US118741892024MEMS Resonator Sensor Substrate for Plasma, Temperature, Stress, or Deposition Sensing
Applied Materials, Inc.
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites
- US115642922023Monolithic Modular Microwave Source with Integrated Temperature Control
Applied Materials, Inc.
0 cites - 0 cites