Petrus Wilhelmus Smorenburg

4 Patents

• US124742672025

  Wavefront Metrology Sensor and Mask Therefor, Method for Optimizing a Mask and Associated Apparatuses

  ASML Netherlands B.V.

  0 cites
• US124114212025

  Metrology Apparatus Based on High Harmonic Generation and Associated Method

  ASML Netherlands B.V.

  0 cites
• US121966882025

  Method and Apparatus for Efficient High Harmonic Generation

  ASML NETHERLANDS B.V.

  0 cites
• US120449512024

  Illumination Source and Associated Metrology Apparatus

  ASML Netherlands B.V.

  0 cites