Patents/Inventors

Peter Ventzek

Austin, TXUS13 patents

16 Patents

US123946292025
Plasma Processing Methods Using Low Frequency Bias Pulses
Tokyo Electron Limited
0 cites
US122886922025
Method of Forming a FET Structure by Selective Deposition of Film on Source/drain Contact
TOKYO ELECTRON LIMITED
0 cites
US122725202025
Process Control Enabled VDC Sensor for Plasma Process
Tokyo Electron Limited
0 cites
US122304752025
Systems and Methods of Control for Plasma Processing
Tokyo Electron Limited
0 cites
US121892972025
Methods for Extreme Ultraviolet (EUV) Resist Patterning Development
Tokyo Electron Limited
0 cites
US121318882024
Gas Cluster Assisted Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US120572932024
Methods for Real-time Pulse Measurement and Pulse Timing Adjustment to Control Plasma Process Performance
Tokyo Electron Limited
0 cites
US120149012024
Tailored Electron Energy Distribution Function by New Plasma Source: Hybrid Electron Beam and RF Plasma
Tokyo Electron Limited
0 cites
US119159102024
Fast Neutral Generation for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US118307092023
Broadband Plasma Processing Systems and Methods
Tokyo Electron Limited
0 cites
US118172952023
Three-phase Pulsing Systems and Methods for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US116885862023
Method and Apparatus for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US116055362023
Cyclic Low Temperature Film Growth Processes
Tokyo Electron Limited
0 cites
US116055392023
Defect Correction on Metal Resists
Tokyo Electron Limited
0 cites
US116055422023
Method for Dry Etching Compound Materials
TOKYO ELECTRON LIMITED
0 cites
US115453642023
Pulsed Capacitively Coupled Plasma Processes
Tokyo Electron Limited
0 cites